VAKIA-OEC-1350 optical thin-films deposition machines(electron gun)

Model

Function

VAKIA-OEC-900

VAKIA-OEC-1200

VAKIA-OEC-1350

Vacuum Chamber

Inner Size

φ900*H1050mm

φ1200*H1250mm

φ1350*H1450mm

frock clamp

Arch single workpiece

tray,satisfy customers’

demand of uniformity to a greater extent,rotate 5 to 30 r/min,

Continuously Variable

Transmission

1 Arch single workpiece tray,satisfy customers’

demand of uniformity to a greater extent,rotate 5 to 30 r/min, Continuously Variable Transmission.

2 Arch three workpiece tray,planetary,

revolution-autorotation, satisfy customers’

demand of productivity,rotate 5 to 30 r/min,

Continuously Variable Transmission

Vacuum system

Diffusion pump

KT-600(VAKIA),

Roots Pump ZJ-300,

Mechanical pump2X-70,

Holding pump2X-8,

Pipeline is made of

304 Stainless Steel

Diffusion pump

KT-800(VAKIA),

Roots Pump ZJ-600,

Mechanical pump2X-70,

Holding pump2X-8,

Pipeline is made of

304 Stainless Steel

Diffusion pump

KT-800(VAKIA),

Roots Pump ZJ-300,

Mechanical pump2X-70,

Holding pump2X-15,

Pipeline is made of

304 Stainless Steel

Ultimate Vacuum:superior to 6.0×10-4Pa

Be equipped with anti-turbulence device,safety interlock, Automatic and Manual operation mode optional

Heating System

Heating on the thermotube,PID control,highest 350 °C±1.5°C

Inflation of process gas

Gas mass control meter or gas filled valve

Which can be manually  fine tuning

Vacuum Ion

bombardment

Direct Current3KV,0.6KW clavate cathode(used for cleaning 

Workpiece by itself before coating) and gas ion source select

Evaporation source(selected)

1 Electron gun:6KW,high pressure4 KV to 10 KV adjustable. Positioning scanning,triangular scanning,circular scanning,spiral scanning,orthogonal scanning,sine wave, focusing capability of beam spot is good,positioning accuracy is high, good reproducibility

2 crucible:six pointsφ38*20 crucible or four pointsφ38*20 plus anotherpoint arc crucible which center arc length is 87(used for high consumption and low melting point of evaporation material) or crucibleφ48*18

Ion source(selected)

1.5KV hall ion source:used for cleaning before electroplating or assisted deposition,which helped acquiring the higher refractivity,firmness,good

compactness and strong adhesion

Coating control

system(selected)

Quartz crystal film thickness control meter:can store up 1 to 99 layer

automation coating process,99 kinds of data,is of high precision

Optical film thickness control meter:adopted multi-wave full spectrum

destination analysis technology,judge film layer through the curve analysis of 370 to 870mm transmissivity (or reflectivity) of monitoring chips,can achieve high control precision