Floor tile metalizing machine

Model Function      

VAKIA-SRC-900

VAKIA-SRC -1000

VAKIA-SRC -1200

VAKIA-SRC-1400

VAKIA-SRC-1500

VAKIA-SRC-1800

Vacuum Chamber Inner Size

φ900*H1100mm

φ1000*H1200mm

φ1200*H1500mm

φ1400*H1800mm

φ1500*H1900mm

φ1800*H2000mm

Power Supply Type

Resistance Evaporation Power Supply,Ion bombardment Power Supply,Filament power supply,Pulse Bias Power Supply,Direct Current magnetron power Supply,Medium Frequency Magnetron Power Supply

Structure of Vacuum Chamber

Vertical Double Door,Vertical Single Door,Horizontal Single Door,Back Vacuum Acquisition System

Material of Vacuum Chamber

Superior Stainless Steel Chamber

Ultimate Vacuum

8.0×10-4Pa

Pump-out Time(no-load)

From air to 5.0×10-2Pa≤8min

Vacuum Acquisition System

Diffusion pump or molecular pump+Roots pump+Mechanical pump+Holding pump(The specification can be selected according customer’s demand)

Coating Style

Evaporation coating+magnetron sputtering coating

Kinds of Film

metal film,semi-transparent film,Non conductive vacuum metallization filmElectromagnetic Interference film,Dielectric film

The Style of Magnetron target

Rectangle magnetron target,cylindrical magnetron target,twin magnetron dual target

Power of Magnetron bias power supply and the number of magnetron target

The appropriate equipment is selected according to demanders’requirements and different techniques

Work Piece Rotation maximum valid diameter

6 axis φ260mm

6 axisφ280mm

6 axis φ360mm8 axis φ280mm

6 axis φ420mm8 axis φ350mm

6 axis φ460mm8 axis φ380mm

6 axis φ560mm8 axis φ460mm

Evaporation electrode

Standard configure 2 pair

Evaporation Power

15KW

15KW

20KW

25 KW

30KW

35KW

Total Power

50KW

50KW

65KW

85 KW

100KW

135KW

Process Gas

Two or three process gas flow control and display system,select automatic filling system

Cooling System

Water-cooling circulatory system,cooling water tower or industrial cooling water machine is also needed(which are supplied by demander)

Work Piece Rotating Stand and Rotating Style

Planetary revolution-autorotation and frequency conversion speed regulation(controlled and adjustable)

Control Mode

Automatic and Manual operation modes integrated,touch screen,PLC or computer control

Alarm and Protection

It has the function of alarm in case of the existence of abnormal conditions like water failure or over-current or over-voltage disconnection.It can carries out protective measurements and has the function of interlock.

Cover Area

W3m×L3m

W3m×L3m

W3.5m×L4m

W5m×L5m

W6m×L6m

W6m×L8m

Other Technical Parameters

Water pressure≥0.2MPa,water temperature≤25°C,gas pressure0.5-0.8MPa

Remark

Designed flexible and select the appropriate equipment according to demanders’requirements