- Contact Person : Ms. Lin Cindy
- Company Name : Shanghai Vakia Coating Technology Co., Ltd.
- Tel : 0086-21-57728812
- Fax : 0086-21-57746698
- Address : Shanghai,Shanghai,Guangsu Industrial Park,No.888,Kungang Road,Songjiang District,Shanghai,China
- Country/Region : China
- Zip : 201614
VAKIA-ASC-1500 multi-arc combination with medium frequency magnetron sputtering vacuum coater
1.Products Characteristic:
VAKIA- ASC Series Vacuum arc composite magnetron sputtering ion plating machine is mainly used for the coating system to a variety of metal film also can plated multilayer ,alloy film and chemicals, such as plating superhard wear-resistant film, anti-corrosion coating decorative film (gold, silver, black, red, blue, green and other colors), combined with magnetron sputtering coated multilayer films can be deposited on stainless steel, aluminum, titanium, tungsten and other metal films, but also can be coated film of TiN ,TiC, TiCN, TiAlN, CrN, the CU, AU, the diamond film (DLC), the decorative film ,non-metallic also it’s compounds film and multilayer. Applies to hardware, glass handicrafts, pottery, etc,such as watches, mobile phones metal cover, sanitary ware, mold, electronic products, crystal glass, eyeglass frame, tableware, knives and so on. In recent years, electric arc ion plating technology has been greatly developed, from the original single arc source to the column arc, large flat arc,etc. But also makes the equipment applicable widely combined with the technology of frequency magnetron sputtering, for example, the application of hard coatings, more smooth and well decorative coating applications.
2.Feature:
1).Metal amd alloy coatings,Multi-layer hybrid coatings and compounds coatings,coatings characterized by:high bright fine and smooth,high hardness,wear resistance,corrosion resistance and decorative
2)IPG,TiN,TiC,TiCN,TiALN,CrN,Cu,DLC can be deposited
2.Application:
Hardware,Glass,Ceramic,Mobile phones,Watches Mechanical parts,Mold
Model Function | VAKIA -ASC -700 | VAKIA -ASC -900 | VAKIA -ASC -1000 | VAKIA -ASC -1250 | VAKIA -ASC -1400 | VAKIA -ASC -1600 |
Vacuum Chamber Inner Size | φ700 *H900 mm | φ900 *H1100 mm | φ1000 *H1200 mm | φ1250 *H1350 mm | φ1400 *H1600 mm | φ1600 *H1800 mm |
Power Supply Type | Arc Power Supply,Filament power supply,Pulse Bias Power Supply, Direct Current magnetron power supply,Medium Frequency Magnetron Power Supply,Radio Frequency Magnetron Power Source,Linear Ionization Source | |||||
Structure of Vacuum Chamber | Vertical Front Door Structure,Back Pump-out System,Double Water Cooling Chamber | |||||
Material of Vacuum Chamber | Superior Stainless Steel Chamber | |||||
Ultimate Vacuum | 6.0×10-4Pa | |||||
Pump-out Time(no-load) | From air to 8.0×10-3Pa≤15min | |||||
Vacuum Acquisition System | Diffusion pump or molecular pump+Roots pump+Mechanical pump+Holding pump(The specification can be selected according to customer’s demand) | |||||
Coating Style | Cathodic arc coating+magnetron sputtering coating | |||||
Kinds of Film | Decoration film(TiN,TiC,ZrN,TiALN,CrN),metal film,reaction film | |||||
The Style of Magnetron target | Rectangle magnetron target,cylindrical magnetron target,twin magnetron dual target | |||||
Power of magnetron power supply and the number of magnetron target | The appropriate equipment is selected according to demanders’requirements and different techniques | |||||
Arc Power Supply | 4 or 6 sets | 6 or 8 sets | 8 or 10 sets | 10 or 12 sets | 14 or 16 sets | 16 or 18 sets |
Bias Power Supply | 10KW/set | 20KW/set | 20KW/set | 30 KW/set | 40KW/set | 50KW/set |
Work Piece Rotating Stand and Rotating Style | Planetary revolution-autorotation and frequency conversion speed regulation (controlled and adjustable) | |||||
Heating temperature of Work Piece | It can be controlled and adjustable when the room temperature is 450°C(PID control)
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Process Gas | Three or four process gas flow control and display system,select automatic filling system | |||||
Cooling System | Water-cooling circulatory system,cooling water tower or industrial cooling water machine or deep cooling system is also needed(which are supplied by demander) | |||||
Control Mode | Automatic and Manual operation modes integrated,touch screen,PLC or computer control | |||||
Total Power | 40KW | 45KW | 50KW | 60 KW | 75KW | 90KW |
Alarm and Protection | It has the function of alarm in case of the existence of abnormal conditions like water failure or over-current or over-voltage disconnection.It can carries out protective measurements and has the function of interlock. | |||||
Cover Area | W2m×L3m | W2.5m×L3.5m | W3m×L4m | W4m×L5m | W4.5m×L6m | W5m×L7m |
Other Technical parameters | Water pressure≥0.2MPa,water temperature≤25°C,gas pressure0.5-0.8MPa | |||||
Remark | Designed flexible and select the appropriate equipment according to demanders’requirements | |||||
3.Coating Samples
VAKIA-ASC-1500 multi-arc combination with medium frequency magnetron sputtering vacuum coater
