VAKIA-ASC-1300 multi-arc combination with medium frequency magnetron sputtering vacuum coater

             Model

Function      

VAKIA

-ASC

-700

VAKIA

-ASC

-900

VAKIA

-ASC -1000

VAKIA

-ASC

-1250

VAKIA

-ASC

-1400

VAKIA

-ASC

-1600

Vacuum Chamber

Inner Size

φ700

*H900

mm

φ900

*H1100

mm

φ1000

*H1200

mm

φ1250

*H1350

mm

φ1400

*H1600

mm

φ1600

*H1800

mm

Power Supply Type

Arc Power Supply,Filament power supply,Pulse Bias Power Supply,

Direct Current magnetron power supply,Medium Frequency

Magnetron Power Supply,Radio Frequency Magnetron Power

Source,Linear Ionization Source

Structure of Vacuum Chamber

Vertical Front Door Structure,Back Pump-out System,Double Water Cooling Chamber

Material of Vacuum Chamber

Superior Stainless Steel Chamber

Ultimate Vacuum

6.0×10-4Pa

Pump-out Time(no-load)

From air to 8.0×10-3Pa≤15min

Vacuum Acquisition

System

Diffusion pump or molecular pump+Roots pump+Mechanical pump+Holding pump(The specification can be selected according to customer’s demand)

Coating Style

Cathodic arc coating+magnetron sputtering coating

Kinds of Film

Decoration film(TiN,TiC,ZrN,TiALN,CrN),metal film,reaction film

The Style of Magnetron target

Rectangle magnetron target,cylindrical magnetron target,twin magnetron dual target

Power of

magnetron power supply

and the

number of

magnetron target

The appropriate equipment is selected according to demanders’requirements and different techniques

Arc Power

Supply

4 or 6 sets

6 or 8 sets

8 or 10 sets

10 or 12 sets

14 or 16 sets

16 or 18 sets

Bias Power

Supply

10KW/set

20KW/set

20KW/set

30 KW/set

40KW/set

50KW/set

Work Piece

Rotating Stand and Rotating

Style

Planetary revolution-autorotation and frequency conversion speed regulation

(controlled and adjustable)

Heating temperature of Work Piece

It can be controlled and adjustable when the room temperature is 450°C(PID control)

Process Gas

Three or four process gas flow control and display system,select automatic filling system

Cooling System

Water-cooling circulatory system,cooling water tower or industrial cooling water machine or deep cooling system is also needed(which are supplied by demander)

Control Mode

Automatic and Manual operation modes integrated,touch screen,PLC or computer control

Total Power

40KW

45KW

50KW

60 KW

75KW

90KW

Alarm and

Protection

It has the function of alarm in case of the existence of abnormal conditions like water failure or over-current or over-voltage disconnection.It can carries out protective measurements and has the function of interlock.

Cover Area

W2m×L3m

W2.5m×L3.5m

W3m×L4m

W4m×L5m

W4.5m×L6m

W5m×L7m

Other Technical

parameters

Water pressure≥0.2MPa,water temperature≤25°C,gas pressure0.5-0.8MPa

Remark

Designed flexible and select the appropriate equipment according to

demanders’requirements